Authors: Almaev, Aleksei V. | Kopyev, Viktor V. | Novikov, Vadim A. | Chikiryaka, Andrei V. | Yakovlev, Nikita N. | Usseinov, Abay B. | Karipbayev, Zhakyp T. | Akilbekov, Abdirash T. | Koishybayeva, Zhanymgul K. | Popov, Anatoli I.

Source: Materials. 2023. Vol. 16, № 1. P. 342 (1-16)

Type: статьи в журналах

Date: 2023

Description: Indium tin oxide thin films were deposited by magnetron sputtering on ceramic aluminum nitride substrates and were annealed at temperatures of 500 °C and 600 °C. The structural, optical, electrically ... More

Authors: Almaev, Aleksei V. | Chernikov, Evgeniy V. | Novikov, Vadim A. | Kushnarev, Bogdan O. | Yakovlev, Nikita N. | Chuprakova, Ekaterina V. | Oleinik, Vladimir L. | Lozinskaya, Anastassiya D. | Gogova, Daniela S.

Source: Journal of vacuum science & technology A. 2021. Vol. 39, № 2. P. 023405-1-023405-11

Type: статьи в журналах

Date: 2021

Description: High-temperature β-Ga2O3:Cr2O3-based sensors sensitive to oxygen- and hydrogen-containing gases have been developed and studied. Magnetron cosputtering is the method of choice for the thin film synthe ... More