Authors: Almaev, Aleksei V. | Yakovlev, Nikita N. | Almaev, Dmitry A. | Verkholetov, Maksim G. | Rudakov, Grigory A. | Litvinova, Kristina I.

Source: Micromachines. 2023. Vol. 14, № 10. P. 1875 (1-14)

Type: статьи в журналах

Date: 2023

Description: The gas sensitivity and structural properties of TiO2 thin films deposited by plasma-enhanced atomic layer deposition (ALD) were examined in detail. The TiO2 thin films are deposited using Tetrakis(di ... More

Authors: Chernikov, Evgeniy V. | Davletkildeev, Nadim A. | Sokolov, Denis V. | Almaev, Aleksei V.

Source: Superlattices and microstructures. 2020. Vol. 139. P. 106392 (1-12)

Type: статьи в журналах

Date: 2020

Description: This article reveals the gas-sensitive properties of polycrystalline gallium oxide thin films with chromium additives. Incorporation of the Cr2O3 phase into the β-phase gallium oxide film structure le ... More