Электронная библиотека (репозиторий) Томского государственного университета
Almaev, Aleksei V. | магнетронное напыление

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Add   Structural, electrical and gas-sensitive properties of Cr2O3 thin films
Authors: Almaev, Aleksei V. | Kushnarev, Bogdan O. | Chernikov, Evgeniy V. | Novikov, Vadim A. | Korusenko, Petr M. | Nesov, Sergey N.
Source: Superlattices and microstructures. 2021. Vol. 151. P. 106835 (1-12)
Type: статьи в журналах
Date: 2021
Description: Cr2O3 thin films were synthesized by RF magnetron sputtering of a Cr target in an oxygen-argon plasma. The effect of annealing temperature on the structural, electrical, and gas-sensitive properties o ... More
Add   Oxygen sensors based on gallium oxide thin films with addition of chromium
Authors: Chernikov, Evgeniy V. | Davletkildeev, Nadim A. | Sokolov, Denis V. | Almaev, Aleksei V.
Source: Superlattices and microstructures. 2020. Vol. 139. P. 106392 (1-12)
Type: статьи в журналах
Date: 2020
Description: This article reveals the gas-sensitive properties of polycrystalline gallium oxide thin films with chromium additives. Incorporation of the Cr2O3 phase into the β-phase gallium oxide film structure le ... More
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