Электронная библиотека (репозиторий) Томского государственного университета
2021 | Novikov, Vadim A.

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Add   Impact of Cr2O3 additives on the gas-sensitive properties of β-Ga2O3 thin films to oxygen, hydrogen, carbon monoxide, and toluene vapors
Authors: Almaev, Aleksei V. | Chernikov, Evgeniy V. | Novikov, Vadim A. | Kushnarev, Bogdan O. | Yakovlev, Nikita N. | Chuprakova, Ekaterina V. | Oleinik, Vladimir L. | Lozinskaya, Anastassiya D. | Gogova, Daniela S.
Source: Journal of vacuum science & technology A. 2021. Vol. 39, № 2. P. 023405-1-023405-11
Type: статьи в журналах
Date: 2021
Description: High-temperature β-Ga2O3:Cr2O3-based sensors sensitive to oxygen- and hydrogen-containing gases have been developed and studied. Magnetron cosputtering is the method of choice for the thin film synthe ... More
Add   Structural, electrical and gas-sensitive properties of Cr2O3 thin films
Authors: Almaev, Aleksei V. | Kushnarev, Bogdan O. | Chernikov, Evgeniy V. | Novikov, Vadim A. | Korusenko, Petr M. | Nesov, Sergey N.
Source: Superlattices and microstructures. 2021. Vol. 151. P. 106835 (1-12)
Type: статьи в журналах
Date: 2021
Description: Cr2O3 thin films were synthesized by RF magnetron sputtering of a Cr target in an oxygen-argon plasma. The effect of annealing temperature on the structural, electrical, and gas-sensitive properties o ... More
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