Authors: Almaev, Aleksei V. | Yakovlev, Nikita N. | Almaev, Dmitry A. | Verkholetov, Maksim G. | Rudakov, Grigory A. | Litvinova, Kristina I.

Source: Micromachines. 2023. Vol. 14, № 10. P. 1875 (1-14)

Type: статьи в журналах

Date: 2023

Description: The gas sensitivity and structural properties of TiO2 thin films deposited by plasma-enhanced atomic layer deposition (ALD) were examined in detail. The TiO2 thin films are deposited using Tetrakis(di ... More

Authors: Almaev, Aleksei V. | Kopyev, Viktor V. | Novikov, Vadim A. | Chikiryaka, Andrei V. | Yakovlev, Nikita N. | Usseinov, Abay B. | Karipbayev, Zhakyp T. | Akilbekov, Abdirash T. | Koishybayeva, Zhanymgul K. | Popov, Anatoli I.

Source: Materials. 2023. Vol. 16, № 1. P. 342 (1-16)

Type: статьи в журналах

Date: 2023

Description: Indium tin oxide thin films were deposited by magnetron sputtering on ceramic aluminum nitride substrates and were annealed at temperatures of 500 °C and 600 °C. The structural, optical, electrically ... More