https://vital.lib.tsu.ru/vital/access/manager/Index en-us 5 Effect of the content of silicon on the optical properties of Al–Si–N coatings irradiated with carbon ions in the short-pulse implantation mode https://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000998292 Fri 24 Mar 2023 10:53:30 KRAT ]]>