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Source: Journal of surface investigation: X-ray, synchrotron and neutron techniques. 2022. Vol. 16, № 5. P. 702-711
Type: статьи в журналах
Date: 2022
Source: Journal of surface investigation: X-ray, synchrotron and neutron techniques. 2021. Vol. 15, № 1. P. 139-146
Type: статьи в журналах
Date: 2021
Description:
Abstract: In this paper, we study the optical properties of aluminum- and silicon-nitride films and Al–Si–N coatings with variable atomic composition deposited by reactive magnetron sputtering on glas
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