The main morphology parameters of microstrip Au/i-GaAs coplanar microwave transmission lines (CTL) with length lWinfluenced on its skin depth resistance R wide of δ and inductivity L are defined at frequencies f>10 GHz. Due to the sizes of Au grains formed CTL dx<130 nm, surface roughness h400 nmand fractal character of its lateral distribution in CTL plane, the features in electron scattering processes arise and lead to the formation of significant size effects in local approximation. Necessary condition lball