Электронная библиотека (репозиторий) Томского государственного университета

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Source: Russian metallurgy (Metally). 2015. № 4. P. 278-284
Type: статьи в журналах
Date: 2015
Description: The columnar structure of titanium nitride–based coatings deposited by magnetron sputtering is studied. The structure–phase state of the coatings is analyzed after deposition and in the indentation zo ... More
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