Authors: Slabodchikov, Vladimir A. | Borisov, Dmitry P. | Kuznetsov, Vladimir M.

Source: AIP Conference Proceedings. 2016. Vol. 1783. P. 020210-1-020210-4

Type: статьи в журналах

Date: 2016

Description: The paper presents research results on the adhesion properties of Si coatings synthesized by different methods and under different conditions of preliminary vacuum ion plasma treatment of substrates w ... More

Authors: Bozhko, Irina A. | Pershukova, Anastasiya | Fedorischeva, Marina | Khristenko, Yury F. | Sergeev, Victor P. | Rybalko, Evgeniya

Source: AIP Conference Proceedings. 2016. Vol. 1772. P. 030014-1-030014-8

Type: статьи в журналах

Date: 2016

Description: The paper presents the results of investigations of the structural and phase conditions, mechanical and optical properties of Al-Si-N system coating obtained by magnetron sputtering. The thickness of ... More