Электронная библиотека (репозиторий) Томского государственного университета
Khristenko, Yury F.

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Source: Vacuum. 2017. Vol. 143. P. 454-457
Type: статьи в журналах
Date: 2017
Description: Nanocomposite transparent coatings on the quartz substrates based on the Si-Al-N system were formed by pulsed magnetron sputtering. The protective properties of the coatings were discovered by means o ... More
Source: AIP Conference Proceedings. 2016. Vol. 1772. P. 030014-1-030014-8
Type: статьи в журналах
Date: 2016
Description: The paper presents the results of investigations of the structural and phase conditions, mechanical and optical properties of Al-Si-N system coating obtained by magnetron sputtering. The thickness of ... More
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