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Kozyukhin, Sergey A.
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2021
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DOI Доступ к ресурсу на сайте издателя
10.1007/s11182-021-02272-y
Title
Thermal stability of the structure and optical properties of nanostructured TiO2 films
Creator
Mikhailova, S. L.
Creator
Prikhodko, O. Yu.
Creator
Mukhametkarimov, Ye. S.
Creator
Dautkhan, K.
Creator
Doseke, U. A.
Creator
Kozyukhin, Sergey A.
Creator
Kozik, Vladimir V.
Creator
Ismailova, G. A.
Creator
Maksimova, S. Ya.
Creator
Tarapeyeva, A. Yu.
Creator
Zhakypov, A. S.
Subject
пленки диоксида титана
ионно-плазменное напыление
отжиг
структура
оптическая ширина запрещенной зоны
индекс преломления
Date
2021
DOI
10.1007/s11182-021-02272-y
Description
The structure and optical properties of titanium dioxide films have been studied during annealing from 100 to 400°C. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO2 films are nanostructured with ~8 nm rutile crystallites and ~3.3 Å interplanar distances and contain a small fraction of anatase. The optical band gap of the films is 3.01 eV, and the refractive index under normal conditions is 2.25. The film annealing at tamperatures from 100 to 400°C does not practically change their structure, optical band gap, and refractive index under normal conditions, i.e., the obtained nanostructured TiO2 films are thermally stable. © 2021, Springer Science+Business Media, LLC, part of Springer Nature.
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Химический факультет
Identifier
koha:000896807
https://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000896807
Type
статьи в журналах
Source
Russian physics journal. 2021. Vol. 63, № 12. P. 2045-2051
Language
eng
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Химический факультет
Thermal stability of the structure and optical properties of nanostructured TiO2 films
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