Электронная библиотека (репозиторий) Томского государственного университета
2022

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Add   Effect of short-pulsed ion irradiation on the optical and electrical properties of titanium nitride films deposited by reactive magnetron sputtering
Authors: Konusov, Fedor V. | Pavlov, S. K. | Lauk, A. L. | Kabyshev, A. V. | Novikov, V. | Gadirov, Ruslan M. | Tarbokov, V. A. | Remnev, Gennady E.
Source: Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms. 2022. Vol. 526. P. 51-59
Type: статьи в журналах
Date: 2022
Description: The effect of short-pulsed irradiation with 220 keV carbon ions for fluences of 2.2 x 10(13) - 2.1 x 10(15) cm(-2 )on the optical and electrical properties of titanium nitride films deposited by react ... More
Add   Effect of the content of silicon on the optical properties of Al–Si–N coatings irradiated with carbon ions in the short-pulse implantation mode
Authors: Konusov, Fedor V. | Pavlov, S. K. | Lauk, A. L. | Tarbokov, V. A. | Remnev, Gennady E. | Gadirov, Ruslan M.
Source: Journal of surface investigation: X-ray, synchrotron and neutron techniques. 2022. Vol. 16, № 5. P. 702-711
Type: статьи в журналах
Date: 2022
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