Электронная библиотека (репозиторий) Томского государственного университета
2021

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Source: Semiconductors. 2021. Vol. 55, № 3. P. 346-353
Type: статьи в журналах
Date: 2021
Description: The effect of ambient humidity on the electrical conductivity of α-Ga2O3 and α-Ga2O3/ε-Ga2O3 is investigated. Polymorphic epitaxial Ga2O3 layers are deposited by the method of chloride vapor-phase epi ... More
Source: IEEE sensors journal. 2021. Vol. 21, № 13. P. 14636-14644
Type: статьи в журналах
Date: 2021
Description: Electrical conductivity and gas sensitivity of α-Ga2O2/ ε(κ)-Ga2O3 structures were measured for oxygen concentrations ranging from 2 % to 100 % and temperatures ranging from 25 °C to 220 °C. It was fo ... More
Source: ECS meeting abstracts. 2021. Vol. MA2021-01, № 56. P. 1475
Type: статьи в журналах
Date: 2021
Description: Miniature O2 sensors with low energy consumption are of practical interest for the chemical and metallurgical industries, development of systems for analyzing the performance of internal combustion en ... More
Source: Materials physics and mechanics. 2021. Vol. 47, № 4. P. 577-581
Type: статьи в журналах
Date: 2021
Description: Gallium oxide films were grown by HVPE on (0001) sapphire substrates with and without α-Cr2O3 buffer produced by RF magnetron sputtering. Deposition on bare sapphire substrates resulted in a mixture o ... More
Source: Journal of vacuum science & technology A. 2021. Vol. 39, № 2. P. 023405-1-023405-11
Type: статьи в журналах
Date: 2021
Description: High-temperature β-Ga2O3:Cr2O3-based sensors sensitive to oxygen- and hydrogen-containing gases have been developed and studied. Magnetron cosputtering is the method of choice for the thin film synthe ... More
Source: Superlattices and microstructures. 2021. Vol. 151. P. 106835 (1-12)
Type: статьи в журналах
Date: 2021
Description: Cr2O3 thin films were synthesized by RF magnetron sputtering of a Cr target in an oxygen-argon plasma. The effect of annealing temperature on the structural, electrical, and gas-sensitive properties o ... More
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