Authors: Konusov, Fedor V. | Pavlov, S. K. | Lauk, A. L. | Kabyshev, A. V. | Novikov, V. | Gadirov, Ruslan M. | Tarbokov, V. A. | Remnev, Gennady E.

Source: Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms. 2022. Vol. 526. P. 51-59

Type: статьи в журналах

Date: 2022

Description: The effect of short-pulsed irradiation with 220 keV carbon ions for fluences of 2.2 x 10(13) - 2.1 x 10(15) cm(-2 )on the optical and electrical properties of titanium nitride films deposited by react ... More

Authors: Konusov, Fedor V. | Pavlov, S. K. | Lauk, A. L. | Kabyshev, A. V. | Gadirov, Ruslan M.

Source: Journal of surface investigation: X-ray, synchrotron and neutron techniques. 2021. Vol. 15, № 1. P. 139-146

Type: статьи в журналах

Date: 2021

Description: Abstract: In this paper, we study the optical properties of aluminum- and silicon-nitride films and Al–Si–N coatings with variable atomic composition deposited by reactive magnetron sputtering on glas ... More