Электронная библиотека (репозиторий) Томского государственного университета
плазма

Add to Quick Collection   All 2 Results

Showing items 1 - 2 of 2.
  • «
  • ←
  • 1
  • →
  • »
Sort:
 Add All Items to Quick Collection
Add   Effect of bias voltage on coating homogeneity in plasma immersion ion implantation
Authors: Slabodchikov, Vladimir A. | Borisov, Dmitry P. | Kuznetsov, Vladimir M.
Source: AIP Conference Proceedings. 2016. Vol. 1783. P. 020209-1-020209-4
Type: статьи в журналах
Date: 2016
Description: The paper presents research results demonstrating the influence of bias on the homogeneity of plasma immersion ion implantation. The research results allow the conclusion that plasma immersion ion imp ... More
Add   Effect of vacuum conditions and plasma concentration on the chemical composition and adhesion of vacuum-plasma coatings
Authors: Borisov, Dmitry P. | Kuznetsov, V. M. | Slabodchikov, V. A.
Source: Journal of Physics: Conference Series. 2015. Vol. 652. P. 012020 (1-5)
Type: статьи в журналах
Date: 2015
Description: The paper reports on the chemical composition of titanium nitride (TiN) and silicon (Si) coatings deposited with a new technological vacuum plasma setup which comprises magnetron sputtering systems, a ... More
  • «
  • ←
  • 1
  • →
  • »
^