Электронная библиотека (репозиторий) Томского государственного университета

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Source: Vacuum. 2023. Vol. 207. P. 111690 (1-10)
Type: статьи в журналах
Date: 2023
Description: This work aims to study hexamethyldisiloxane (HMDSO) plasma polymerization in a low-pressure glow discharge in a gas flow. HMDSO was activated in a plasma-chemical reactor with a DC glow discharge in ... More
Source: 7th International congress on energy fluxes and radiation effects (EFRE-2020 online), September 14–25, 2020, Tomsk, Russia : abstracts. Tomsk, 2020. P. 556
Type: статьи в сборниках
Date: 2020
Source: 7th International congress on energy fluxes and radiation effects (EFRE-2020 online), September 14–25, 2020, Tomsk, Russia : abstracts. Tomsk, 2020. P. 106
Type: статьи в сборниках
Date: 2020
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