The deposition of the multilayer nanostructuring coatings on the basis of Zr-Y-O are formed by pulse magnetron method. Structure-phase state of nanostructuring coatings was investigated by TEM. It was established, that there are the ZrO2 phases in tetragonal and monoclinic modifications in layers on the basis of Zr-Y-O system.
Перспективы развития фундаментальных наук : сборник научных трудов XIII Международной конференции студентов, аспирантов и молодых ученых, Россия, Томск, 26-29 апреля 2016 г.. Томск, 2016. Т. 1 : Физика. С. 70-72