Authors: Zuza, Daniil A. | Nekhoroshev, Vitaly O. | Batrakov, Alexander V. | Markov, Alexey B. | Kurzina, Irina A.

Source: Vacuum. 2023. Vol. 207. P. 111690 (1-10)

Type: статьи в журналах

Date: 2023

Description: This work aims to study hexamethyldisiloxane (HMDSO) plasma polymerization in a low-pressure glow discharge in a gas flow. HMDSO was activated in a plasma-chemical reactor with a DC glow discharge in ... More

Authors: Zuza, Daniil A. | Batrakov, Alexander | Nekhoroshev, Vitaly O. | Kurzina, Irina A. | Popov, Sergey

Source: 2020 7th International Congress on energy fluxes and radiation effects (EFRE 2020), Tomsk, Russia, September 14 – 26, 2020 : proceedings. [S. l.], 2020. P. 1132-1135

Type: статьи в сборниках

Date: 2020

Description: Plasma polymerization is a rapidly growing field of plasma technology. Using this method, it is possible to solve applied problems, for example, the deposition of conformal dielectric coatings to prot ... More