Modification of the microstructure of TiN-based columnar coatings in indentation zones

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Modification of the microstructure of TiN-based columnar coatings in indentation zones	1 MB	Adobe Acrobat PDF	Read	Download
DOI Доступ к ресурсу на сайте издателя			10.1134/S0036029515040126

Title: Modification of the microstructure of TiN-based columnar coatings in indentation zones
Creator: Ovchinnikov, Stanislav V.
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Korotaev, Alexander D.
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Pinzhin, Yury P.
Date: 2015
DOI: 10.1134/S0036029515040126
Description: The columnar structure of titanium nitride–based coatings deposited by magnetron sputtering is studied. The structure–phase state of the coatings is analyzed after deposition and in the indentation zone. The type of dislocation structure, the grain size, the subgrain size, the misorientations at boundaries, and their change during coating growth are determined. The detected decrease (several tens of percent) in the coating thickness under an indenter indicates plastic deformation of a coating. On a microscopic level, this deformation manifests itself in an increase in the density, the misorientation, and the nonequilibrium of boundaries.